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A Compact Ultra-precision Air Bearing Stage with 3-DOF Planar Motions Using Electromagnetic Motors
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  • A Compact Ultra-precision Air Bearing Stage with 3-DOF Planar Motions Using Electromagnetic Motors
  • A Compact Ultra-precision Air Bearing Stage with 3-DOF Planar Motions Using Electromagnetic Motors
저자명
Ro. Seung-Kook,Park. Jong-Kweon
간행물명
International journal of precision engineering and manufacturing
권/호정보
2011년|12권 1호|pp.115-119 (5 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We designed a novel surface motor stage supported by air bearings and driven by linear electromagnetic motors. This compact and simple planar stage is proposed for compact-sized precision machine systems, such as micro-machine tools or measurement systems requiring minimum X-Y stage height. Four single-phase linear motors with coils and iron cores are located under the base plate, and air bearings and cores with permanent magnets are attached under the moving table. The hard, non-magnetic alumina-ceramic base plate surface acts as a planar guide for the air bearings. The attractive magnetic force between the magnets and motor cores preload the air bearing to increase vertical stiffness. By simultaneously combining actuations of the motors, linear X and Y motion can be controlled, and angular motions can also be generated. A grid encoder is used to control planar motion, and the system is run by a programmable numerical controller. The thrust and attractive force were calculated using a magnetic circuit model. The designed prototype is $220(L){ imes}220(W){ imes}66(H)mm^3$ in size with a $20mm{ imes}20mm$ range of motion. After fabrication, basic aspects of the prototype, such as vertical stiffness and thrust force, were evaluated. Twenty nanometers of positioning resolution was obtained for the X and Y axes, and the three motions could be controlled independently.