산세척을 통해 금속급 실리콘을 정련하기 위해 황산, 질산, 염산과 불산의 혼산 용액을 사용하여 $50^{circ}C$에서 불순물의 제거 거동을 조사하였다. 금속급 실리콘에 함유된 불순물중 붕소는 산세척으로 제거되지 않았고, 농축효과로 인해 처리 후 농도가 종가하였다. 본 실험범위에서 인은 약 60% 정도 제거되었다. 황산과 질산용액으로 처리시 주요 불순 금속의 제거율은 50% 미만으로 정련 효과가 크지 않았다. 염산과 불산의 혼산으로 산세척하면 주요 불순 금속이 90% 정도 제거되었다. 각 산세척조건에서 얻은 실리콘의 순도와 주요 불순 금속들의 제거율에 대한 자료를 제시하였다.
Impurity removal from metallurgical grade silicon by acid washing at $50^{circ}C$ was investigated by employing sulfuric, nitric acid and the mixture of hydrochloric and hydrofluoric acid. Acid washing treatment had no effect on the removal of boron and the concentration of this clement after treatment was rather increased. In our experimental range, the removal percentage of phosphorus was 60%. In the acid washing with sulfuric and nitric acid, the removal percentage of major impurities was below 50%, which indicates that refining effect was not great with these acids. Acid washing with the mixture of hydrochloric and hydrofluoric acid led to removal percentage of higher than 90%. Data on the purity of silicon after acid washing at various conditions are reported.
