- UV 레이저 응용 반도체 기판용 임베디드 회로 패턴 가공
- ㆍ 저자명
- 손현기,신동식,최지연,Sohn. Hyon-Kee,Shin. Dong-Sig,Choi. Ji-Yeon
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2011년|14권 1호|pp.14-18 (5 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Semiconductor industry demands decrease in line/space dimensions of IC substrates. Particularly for IC substrates for CPU, line/space dimensions below $10{mu}m/10{mu}m$ are expected to be used in production since 2014. Conventional production technologies (SAP, etc.) based on photolithography are widely agreed to be reaching capability limits. To address this limitation, the embedded circuit fabrication technology using laser ablation has been recently developed. In this paper, we used a nanosecond UV laser and a picosecond UV laser to fabricate embedded circuit patterns into a buildup film with $SiO_2$ powders for IC substrate. We conducted SEM and EDS analysis to investigate surface quality of the embedded circuit patterns. Experimental results showed that due to higher recoil pressure, picosecond UV laser ablation of the buildup film generated a better surface roughness.