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Design and Fabrication of Synthetic Air-Jet Micropump
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  • Design and Fabrication of Synthetic Air-Jet Micropump
  • Design and Fabrication of Synthetic Air-Jet Micropump
저자명
Choi. Jong-Phil,Kim. Kwang-Soo,Seo. Young-Ho,Kim. Byeong-Hee
간행물명
International journal of precision engineering and manufacturing
권/호정보
2011년|12권 2호|pp.355-360 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In this paper, we propose a synthetic jet-type micropump for supplying air. Synthetic jet actuators usually include a small single pumping cavity, inlet/outlet channels, and a Lead zirconate titanate(PZT) membrane that exerts the pumping pressure. To determine the optimum design parameters of the air pump, a numerical analysis was carried out by varying its geometry. The optimized air pump was fabricated by replicating PDMS parts from silicon masters patterned by the deep RIE process. The size of the fabricated micropump was $16{ imes}13{ imes}3mm^3$. In order to control the frequency of the PZT membrane and reduce the controller size and power consumption, an SP4423 microchip was used. At a pumping frequency of 80 Hz, a flow rate of 9.5 cc/min, pumping pressure of 438 Pa, and power consumption less than 0.15 mW were achieved.