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서지반출
Full Cone Type 스월노즐에서 단일분무와 이중분무의 중첩영역에 대한 충격력 평가
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  • Full Cone Type 스월노즐에서 단일분무와 이중분무의 중첩영역에 대한 충격력 평가
저자명
김태현,성연모,정흥철,김덕줄,최경민,Kim. T.H.,Sung.. Y.M.,Jeong. H.C.,Kim. D.J.,Choi. G.M.
간행물명
한국액체미립화학회지
권/호정보
2011년|16권 1호|pp.27-36 (10 pages)
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한국액체미립화학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The impact force on the single and overlap region of twin spray was experimentally evaluated using visualization method in full cone type swirl nozzle spray. Visualization of spray was conducted to obtain the spray angle and breakup process. The photography/imaging technique, based on Particle Image Velocimetry (PIV) using high-speed camera, was adopted for the direct observation of droplet motion and axial velocity measurement, respectively. Droplet size was measured by Particle Motion Analyze System (PMAS). The purpose of this study is to provide fundamental information of spray characteristics, such as impact force, for higher etching factor in the practical wet etching system. It was found that the spray angle, axial velocity and impact force were increased with increasing the nozzle pressure while droplet size decreased with increasing the nozzle pressure. Droplet size increased as the distance from nozzle tip was decreased. The impact force of twin spray in the overlap region was about 63.29, 67.02, 52.41% higher than that of single spray at 40, 50 and 60 mm of nozzle pitch, respectively. Also, the nozzle pitch was one of the important factors in the twin spray characteristics.