- 길이와 두께 비에 따른 두께 전단모드 압전소자의 공진 변위 및 압전특성
- ㆍ 저자명
- 박민호,류주현,홍재일,정영호,Park. Min-Ho,Yoo. Ju-Hyun,Hong. Jae-Il,Jeong. Yeong-Ho
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2011년|24권 6호|pp.463-467 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this study, thickness shear mode piezoelectric devices for AE sensor with excellent displacement and sensitivity characteristics were simulated using ATILA FEM program, and then fabricated. Displacement and electro mechanical coupling factors of the piezoelectric devices were investigated. The simulation results showed that excellent displacement and electromechanical coupling factor was obtained when the ratio of Length/Thickness was 1. The piezoelectric device of L/T= 1 exhibited the optimum values of fr= 150 kHz, displacement= $6.23{ imes}10^{-8}$[m], $k_{15}$= 0.598. The results show that the thickness shear mode piezoelectric device is a promising candidate for the application of AE sensor piezoelectric device.