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Annealing temperature dependence on the positive bias stability of IGZO thin-film transistors
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  • Annealing temperature dependence on the positive bias stability of IGZO thin-film transistors
  • Annealing temperature dependence on the positive bias stability of IGZO thin-film transistors
저자명
Shin. Hyun-Soo,Ahn. Byung-Du,Rim. You-Seung,Kim. Hyun-Jae
간행물명
Journal of information display
권/호정보
2011년|12권 4호|pp.209-212 (4 pages)
발행정보
한국정보디스플레이학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The threshold voltage shift (${Delta}V_{th}$) under positive-voltage bias stress (PBS) of InGaZnO (IGZO) thin-film transistors (TFTs) annealed at different temperatures in air was investigated. The dramatic degradation of the electrical performance was observed at the sample that was annealed at $700^{circ}C$. The degradation of the saturation mobility (${mu}_{sat}$) resulted from the diffusion of indium atoms into the interface of the IGZO/gate insulator after crystallization, and the degradation of the subthreshold slope (S-factor) was due to the increase in the interfacial and bulk trap density. In spite of the degradation of the electrical performance of the sample that was annealed at $700^{circ}C$, it showed a smaller ${Delta}V_{th}$ under PBS conditions for $10^4$ s than the samples that were annealed at $500^{circ}C$, which is attributed to the nanocrystal-embedded structure. The sample that was annealed at $600^{circ}C$ showed the best performance and the smallest ${Delta}V_{th}$ among the fabricated samples with a ${mu}_{sat}$ of $9.38cm^2/V$ s, an S-factor of 0.46V/decade, and a ${Delta}V_{th}$ of 0.009V, which is due to the passivation of the defects by high thermal annealing without structural change.