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RF Power에 따른 태양전지용 N-type ZnS 특성연구
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  • RF Power에 따른 태양전지용 N-type ZnS 특성연구
저자명
양현훈,김한울,정운조,이석호,소순열,박계춘,이진,정해덕,Yang. Hyeon-Hun,Kim. Han-Wool,Jeong. Woon-Jo,Lee. Suk-Ho,So. Soon-Youl,Park. Gye-Choon,Lee. Jin,C
간행물명
전기전자재료학회논문지
권/호정보
2011년|24권 7호|pp.574-577 (4 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this study, we use the $2.5cm{ imes}7.5cm$ soda lime glass as the substrate. We used the ultrasonicator. Glass was dipped in the acetone, methanol and DI water respectively for 10 minutes. Ar(99.99%)gas was used as the sputtering gas. We varied the RF power between 100~175 W with 25 W steps. Base pressure was kept by turbo molecular pump at $3.0{ imes}10^{-6}$ torr. Working pressure was kept by injection of Ar gas. ZnS thin films were deposited with the radio frequency magnetron sputtering technique at various temperatures and sputtering powers. It is also clearly observed that, the intensity of the (111) XRD peak increases with increasing the RF power. Electrical properties were measured by hall effect methods at room temperature. The resistivity, carrier concentration, and hall mobility of ZnS deposited on glass substrate as a function of sputtering power. It can be seen that as the sputtering power increase from 100 to 175 W, the resistivity of the films on glass decreased significantly from $8.1{ imes}10^{-2}$ to $1.2{ imes}10^{-3};{Omega}{cdot}cm$. This behavior could be explained by the effect of the sputtering power on the mobility and carrier concentration. When the RF power increases, the carrier concentration increases slightly while the resistivity decreases significantly. These variation originate from improved crystallinity and enhanced substitutional doping as the sputtering power increases.