- 4절 링크구조를 응용한 플랙셔 힌지 기반 모듈형 나노포지셔너
- ㆍ 저자명
- 채기운,배진현,정영훈,Chae. Ki-Woon,Bae. Jin-Hyun,Jeong. Young-Hun
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2011년|28권 7호|pp.851-858 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.