It is recognized that the control surface fault is detected by monitoring the value of the coefficients due to the control surface deviation. It is found out the control surface stuck position by comparing the trim value with the reference value. To detect and isolate the fault, two mixed methods apply to the real-time parameter estimation and similarity measure. If the scatter of aerodynamic coefficients for the fault and normal are closing nearly, fault decision is difficult. Applying similarity measure to decide for fault or not, it makes a clear and easy distinction between fault and normal. Low power processor is applied to the real-time parameter estimator and computation of similarity measure.