- Ga이 첨가된 ZnO-SnO2막의 구조적 및 전기적 특성
- ㆍ 저자명
- 박기철,마대영,Park. Ki-Cheol,Ma. Tae-Young
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2011년|24권 8호|pp.641-646 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Ga-doped ZnO-$SnO_2$ (ZSGO) films were deposited by rf magnetron sputtering and their structural and electrical properties were investigated. In order to fabricate the target for sputtering, the mixture of ZnO, $SnO_2$ (1:1 weight ratio) and $Ga_2O_3$ (3.0 wt%) powder was calcined at $800^{circ}C$ for 1 h. The substrate temperature was varied from room temperature to $300^{circ}C$. The crystallographic properties and the surface morphologies of the films were studied by X-ray diffraction (XRD) and Scanning Electron Microscopy (SEM). The optical transmittances of the films were measured and the optical energy band gaps were obtained from the absorption coefficients. The resistivity variation with substrate temperature was measured. Auger electron spectroscopy was employed to find the atomic ratio of Zn, Sn, Ga and O in the film deposited at room temperature. ZSGO films exhibited the optical transmittance in the visible region of more than 80% and resistivity higher than $10;{Omega}cm$.