Feasibility of direct machining of micro patterns for micro molds by 2-dimensional vibration assisted cutting or elliptical vibration cutting was investigated and its machinability was compared with the conventional cutting method. Micro patterns of successive V-grooves and micro pyramids were machined on work pieces of a pure nickel, nickel alloy and mold steels with single crystal diamond, cubic boron nitride and poly crystal diamond tools which move along a circular path with a diameter less than 2 ${mu}m$ at an excitation frequency of 18 kHz. It was observed that the utility of EVC, that is a decrease of cutting resistance and an improved machining quality, was retained regardless of materials of work pieces and tools, and the improvement compared to CCM was(ar clearer when machined with a worn cutting tool. The risk of catastrophic or fatigue failure of tool was, however, increased by the impulsive forces resulting from periodic contact making and breaking between the tool and workpiece of high strength and hardness.