기관회원 [로그인]
소속기관에서 받은 아이디, 비밀번호를 입력해 주세요.
개인회원 [로그인]

비회원 구매시 입력하신 핸드폰번호를 입력해 주세요.
본인 인증 후 구매내역을 확인하실 수 있습니다.

회원가입
서지반출
이중 질량체를 사용한 진동형 자이로스코프의 검출부 대역폭 개선
[STEP1]서지반출 형식 선택
파일형식
@
서지도구
SNS
기타
[STEP2]서지반출 정보 선택
  • 제목
  • URL
돌아가기
확인
취소
  • 이중 질량체를 사용한 진동형 자이로스코프의 검출부 대역폭 개선
저자명
황영석,김용권,지창현,Hwang. Yong-Suk,Kim. Yong-Kweon,Ji. Chang-Hyeon
간행물명
전기학회논문지= The Transactions of the Korean Institute of Electrical Engineers
권/호정보
2011년|60권 9호|pp.1733-1740 (8 pages)
발행정보
대한전기학회
파일정보
정기간행물|
PDF텍스트
주제분야
기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In this research, a MEMS vibratory gyroscope with dual-mass system in the sensing mode has been proposed to increase the stability of the device using wide bandwidth. A wide flat region between the two resonance peaks of the dual-mass system removes the need for a frequency matching typically required for single mass vibratory gyroscopes. Bandwidth, mass ratio, spring constant, and frequency response of the dual-mass system have been analyzed with MATLAB and ANSYS simulation. Designed first and second peaks of sensing mode are 5,917 and 8,210Hz, respectively. Driving mode resonance frequency of 7,180Hz was located in the flat region between the two resonance peaks of the sensing mode. The device is fabricated with anodically bonded silicon-on-glass substrate. The chip size is 6mm x 6mm and the thickness of the silicon device layer is $50{mu}m$. Despite the driving mode resonance frequency decrease of 2.8kHz and frequency shift of 176Hz from the sensing mode due to fabrication imperfections, measured driving frequency was located within the bandwidth of sensing part, which validates the utilized dual-mass concept. Measured bandwidth was 768Hz. Sensitivity calculated with measured displacement of driving and sensing parts was 22.4aF/deg/sec. Measured slope of the sensing point was 0.008dB/Hz.