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열증착법으로 성장된 ZnO 나노구조물의 산소유량 변화에 대한 성장 변화
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  • 열증착법으로 성장된 ZnO 나노구조물의 산소유량 변화에 대한 성장 변화
저자명
김경범,장용호,김창일,정영훈,이영진,조정호,백종후,남산,Kim. Kyoung-Bum,Jang. Yong-Ho,Kim. Chang-Il,Jeong. Young-Hun,Lee. Young-Jin,Jo. Jeong-Ho,Paik. Jo
간행물명
전기전자재료학회논문지
권/호정보
2011년|24권 10호|pp.839-843 (5 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

ZnO nanostructures were developed on a Si (100) substrate from powder mixture of ZnO and 5 mol% Pd (ZP-5) as reactants by ${ imes}$ sccm oxygen pressures(x= 0, 10, 20, 40). DTA (differential thermal analysis) result shows the Pd(5 mol%)+ZnO mixtured powder(PZ-5) is easily evaporated than pure ZnO powder. The PZ-5 mixtured powder was characterized by DTA to determine the thermal decomposition which was found to be at $800^{circ}C$, $1,100^{circ}C$. Weight loss(%) and ICP (inductively coupled plasma) analysis reveal that Zn vaporization is decreased by increased oxygen pressures from the PZ-5 at $1,100^{circ}C$ for 30 mins. Needle-like ZnO nanostructures array developed from 10 sccm oxygen pressure, was well aligned vertically on the Si substrate at $1,100^{circ}C$ for 30 mins. The lengths of the Needle-like ZnO nanostructures is about 2 ${mu}m$ with diameters of about 65 nm. The developed ZnO nanostructures exhibited growth direction along [001] with defect-free high crystallinity. It is considered that Zn vaporization is responsible for the growth of Needle-like ZnO nanostructures by controlling the oxygen pressures. The photoluminescence spectra of ZnO nanostructures exhibited stronger 376.7 nm NBE (near band-edge emission) peak and 529.3 nm DLE (deep level energy) peak.