This paper presents a survey of recent wireless power transfer systems. The issue of wireless power transfer is to achieve a highly efficient system with small positioning errors of the facilities setting. Several theories have been presented to obtain precise system design. This paper presents a summary of design theory for short range power transfer systems and detailed formulations based on a circuit model and an array of infinitesimal dipoles. In addition to these theories, this paper introduces a coil array scheme for improving the efficiency for off axis coils. In the microwave range, tightly coupled resonators provide a highly efficient power transfer system. This paper present san-overlay resonator array consisting of half wavelength microstrip line resonators on the substrate with electromagnetically coupled parasitic elements placed above the bottom resonators. The tight couplings between the waveguide and the load resonator give strong power transmission and achieve a highly efficient system, and enables a contact-less power transfer railroad. Its basic theory and a demonstration of a toy vehicle operating with this system are presented. In the last topic of this paper, harmonic suppression from the rectenna is discussed with respect to acircular microstrip antenna with slits and stubs.