This paper proposes a new modeling method for estimating the impedance of an on-chip power/ground meshed plane. Frequency dependent R, L, and C parameters are extracted based on the proposed method so that the model can be applied from DC to high frequencies. The meshed plane model is composed of two parts: coplanar multi strip (CMS) and conductor-backed CMS. The conformal mapping technique and the scaled conductivity concept are used for accurate modeling of the CMS. The developed microstrip approach is applied to model the conductor-backed CMS. The proposed modeling method has been successfully verified by comparing the impedance of RLC circuit based on extracted parameters and the simulated impedance using a 3D-field solver.