- 펨토초 레이저를 이용한 실리카 내부의 다층 회절격자 가공 기술
- ㆍ 저자명
- 최훈국,김진태,손익부,노영철,Choi. Hun-Kook,Kim. Jin-Tae,Sohn. Ik-Bu,Noh. Young-Chul
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2011년|14권 3호|pp.17-20 (4 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
We fabricated a multi-layer diffraction grating inside fused silica glass by using a femtosecond laser direct writing method. The femtosecond laser with a wavelength of 515 nm, a pulse width of 250 fs, a repetition rate of 100 kHz, and an average output power of 6 W was used. Two layer diffraction grating with a grating period of $6{mu}m$ was successfully fabricated with the layer gap of 0.5, 1, 2, 3, and $5{mu}m$, respectively. Also, we investigated the diffraction pattern by illuminating a He-Ne laser beam. Finally, we demonstrated the diffraction grating with a grating period of $3{mu}m$ by adjusting the gap of each layer with a grating period of $6{mu}m$. Femtosecond laser direct writing technology of multi-layer has a potential to fabricate the diffraction grating with a grating period of below $1.5{mu}m$.