- 단일 펨토초 레이저펄스를 이용한 실리콘 표면에서의 시분해 반사율 측정 연구
- ㆍ 저자명
- 문혜영,시두 메라 씽,이현규,정세채,Moon. Heh-Young,Sidhu. Mehra Singh,Lee. Hyun-Kyu,Jeoung. Sae-Chae
- ㆍ 간행물명
- 한국레이저가공학회지
- ㆍ 권/호정보
- 2011년|14권 4호|pp.21-27 (7 pages)
- ㆍ 발행정보
- 한국레이저가공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this work, we have studied on time-resolved transient reflective image of single crystalline Si surface after single-shot fs-laser irradiation with varying the laser fluence under two different laser spot sizes. The temporal profiles of transient reflectivity changes as well as its maximum values at the early delay time were found to be strongly dependent on both the laser beam spot size and laser fluence. We have interpreted the dependence of transient reflectivity changes on the laser spot size in terms of a relaxation of the generated free carriers to the bulk silicon, which should be interacted with the plasma.