- 전자부품의 친환경 세정공정 적용을 위한 유전체장벽 방전 플라즈마 생성 장치 개발
- ㆍ 저자명
- 손영수,함상용,김병인,Son. Young-Su,Ham. Sang-Yong,Kim. Byung-In
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2011년|28권 10호|pp.1217-1223 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.