The ultra-precision products which recently experienced high in demands had included the large areas of most updated technologies, for example, the semiconductor, the computer, the aerospace, the media information, the precision machining. For early 21st century, it was expected that the ultra-precision technologies would be distributed more throughout the market and required securing more nation-wise advancements. Furthermore, there seemed to be increasing in demand of the single crystal diamond tool which was capable of the ultra-precision machining for parts requiring a high degree of complicated details which were more than just simple wrapping and policing. Moreover, the highest degree of precision is currently at 50 nm for some precision parts but not in all. The machining system and technology should be at very high performed level in order to accomplish this degree of the ultra-precision.