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Development of medium resolution cross-dispersed silicon grisms in the Near Infrared ; Direct Silicon wafer bonding technique
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  • Development of medium resolution cross-dispersed silicon grisms in the Near Infrared ; Direct Silicon wafer bonding technique
  • Development of medium resolution cross-dispersed silicon grisms in the Near Infrared ; Direct Silicon wafer bonding technique
저자명
박수종,Jeong. Hyeon-Ju,Wang. Wei-Song,Gully-Santiago. Michael,Deen. Casey,Pak. Soo-Jong,Jaffe. Daniel T.
간행물명
천문학회보
권/호정보
2011년|36권 2호|pp.125-125 (1 pages)
발행정보
한국천문학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

We are developing medium resolution cross-dispersed silicon grisms in the near IR region ($1.45{sim}5.2{mu}m$). The grisms will be installed in MIMIR, a multifunction instrument at the Lowel Observatory, USA. The two devices are designed to cover H and K band and L and M band simultaneously. Our goal is to make grism with R=3000 at 1.2 arcsec slit. The Silicon has high refractive index (n=3.4 at $1.5{mu}m$) which enhances the resolving power by up to 5 times when compared to conventional material such as BK-7 (n=1.5 at 1.5 ${mu}m$). The bonded grisms will be installed in a filter wheel for the uses switch from spectroscopic mode to imaging mode easily. Our device is compact and light weighted while it provides a decent resolving power. We produce monolithic grisms using e-beam lithography at the NASA JPL and chemically etching the grooves on the silicon prisms. Moreover, the main-disperser and cross-disperser will be contacted together by direct Si-Si bonding technique and eventually turn into one piece. The bonded pair offers more stability in terms of the layout of the spectrum and removes the Fresnel loss at the intersection of two grisms. We report on the proper wafer bonding steps through this research, and inspected the bonding quality thermally, optically and mechanically.