- 2 차원 평판가공법을 이용한 고세장비 미세 격벽어레이구조물 가공
- ㆍ 저자명
- 박언석,최환진,김한희,전은채,제태진,Park. Eun-Suk,Choi. Hwan-Jin,Kim. Han-Hee,Jeon. Eun-Chae,Je. Tae-Jin
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2012년|29권 12호|pp.1272-1278 (7 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The micro barrier rip array structures have been applied in a variety of areas including as privacy films, micro heat sinks, touch panel and optical waveguide. The increased aspect ratio (AR) of barrier rip array structures is required in order to increase the efficiency and performance of these products. There are several problems such as burr, defect of surface roughness and deformation and breakage of barrier rip structure with machining high-aspect ratio micro barrier rip array structure using orthogonal cutting method. It is essential to develop technological methods to solve these problems. The optimum machining conditions for machining micro barrier rip array structures having high-aspect ratio were determined according to lengths ($200{mu}m$ and $600{mu}m$) and shape angles ($2.89^{circ}$ and $0^{circ}$) of diamond tool, overlapped cutting depths ($5{mu}m$ and $10{mu}m$), feed rates (100 mm/s) and three machining processes. Based on the optimum machining conditions, micro barrier rib array structures having aspect ratio 30 was machined in this study.