- PLD와 RF 마그네트론 스퍼터링을 이용한 SAW 필터용 ZnO 박막의 특성 연구
- ㆍ 저자명
- 이승환,유윤식,Lee. Seung-Hwan,Yu. Yun-Sik
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2012년|25권 12호|pp.979-983 (5 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
We proposed the ZnO thin film for a SAW filter by PLD and RF sputtering method. ZnO thin films was pre-deposited on a sapphire substrate as a seed layer by PLD method and then deposited on seed layer by RF sputtering. The surface characteristics of ZnO thin film were investigated by XRD, SEM and AFM. The minimum surface roughness was 1.92 nm and FWHM of rocking curve was $0.92^{circ}$. We demonstrated the SAW filter with bandwidth of approximately 0.97 MHz and the center frequency of 18.72 MHz using the proposed ZnO thin film.