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Synthesis and Characterization of a Pt/NiO/Pt Heterostructure for Resistance Random Access Memory
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  • Synthesis and Characterization of a Pt/NiO/Pt Heterostructure for Resistance Random Access Memory
  • Synthesis and Characterization of a Pt/NiO/Pt Heterostructure for Resistance Random Access Memory
저자명
Kim. Hyung-Kyu,Bae. Jee-Hwan,Kim. Tae-Hoon,Song. Kwan-Woo,Yang. Cheol-Woong
간행물명
Applied microscopy
권/호정보
2012년|42권 4호|pp.207-211 (5 pages)
발행정보
한국현미경학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We examined the electrical properties and microstructure of NiO produced using a sol-gel method and Ni nitrate hexahydrate ($Ni[NO_3]_2{cdot}6H_2O$) to investigate if this NiO thin film can be used as an insulator layer for resistance random access memory (ReRAM) devices. It was found that as-prepared NiO film was polycrystalline and presented as the nonstoichiometric compound $Ni_{1+x}O$ with Ni interstitials (oxygen vacancies). Resistances-witching behavior was observed in the range of 0~2 V, and the low-resistance state and high-resistance state were clearly distinguishable (${sim}10^3$ orders). It was also demonstrated that NiO could be patterned directly by KrF eximer laser irradiation using a shadow mask. NiO thin film fabricated by the sol-gel method does not require any photoresist or vacuum processes, and therefore has potential for application as an insulating layer in low-cost ReRAM devices.