- 마이크로 머시닝 기술을 이용한 니켈기반의 압전 진동형 에너지 하베스터 제작
- ㆍ 저자명
- 차두열,이재혁,장성필,Cha. Doo-Yeol,Lee. Jai-Hyuk,Chang. Sung-Pil
- ㆍ 간행물명
- 전기전자재료학회논문지
- ㆍ 권/호정보
- 2012년|25권 1호|pp.62-67 (6 pages)
- ㆍ 발행정보
- 한국전기전자재료학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
Owing to the rapid growth of mobile and electronic equipment miniaturization technology, the supply of micro mobile computing machine has been fast raised. Accordingly they have performed many researches on energy harvesting technology to provide promising power supply equipment to substitute existing batteries. In this paper, in order to have low resonance frequency for piezoelectric energy harvester, we have tried to make it larger than before by adopting nickel that has much higher density than silicon. We have applied it for our energy harvesting actuator instead of the existing silicon based actuator. Through such new concept and approach, we have designed energy harvesting device and made it personally by making with micromachining process. The energy harvester structure has a cantilever type and has a dimension of $10{ imes}2.5{ imes}0.1;mm^3$ for length, width and thickness respectively. Its electrode type is formed by using Au/Ti of interdigitate d33 mode. The pattern size and gap size is 50 ${mu}m$. Based on the measurement of the nickel-based piezoelectric energy harvester, it is found to have 778 Hz for a resonant frequency with no proof mass. In that resonance frequency we could get a maximum output power of 76 ${mu}W$ at 4.8 $M{Omega}$ being applied with 1 g acceleration.