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Analytical Quantification and Effect of Microstructure Development in Thick Film Resistor Processing
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  • Analytical Quantification and Effect of Microstructure Development in Thick Film Resistor Processing
  • Analytical Quantification and Effect of Microstructure Development in Thick Film Resistor Processing
저자명
Lee. Byung Soo
간행물명
마이크로전자 및 패키징 학회지
권/호정보
2012년|19권 4호|pp.33-37 (5 pages)
발행정보
한국마이크로전자및패키징학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Microstructure developments of $RuO_2$ based thick film resistors during firing as a function of glass viscosity were analytically quantified and its effect on the electrical property was investigated. The microstructure development was retarded as the viscosity of glass was increased. It was found that the viscosity range for each stage of microstructure development are as follows ; $7500-10^5Pa{cdot}s$ for the glass sintering, $2000-7500Pa{cdot}s$ for the glass island formation, $700-2000Pa{cdot}s$ for the glass spreading, and $50-700Pa{cdot}s$ for the infiltration. The sheet resistivity decreased as the viscosity of glass in the resistor film increased due to the higher chance of sintering for the conductive particles with the higher viscosity of the glass.