In this study, the ground motion was synthesized using the finite fault model by the stochastic green function method, and the difference in the ground motions was evaluated by using various values of the source parameters. An earthquake with a moment magnitude of 6.5 was assumed for the example fault model. The distribution of the slip in the fault plane was calculated using the statistical data of the asperity area. The source parameters considered in this study were the location of the hypocenter in the fault plane and the ratio of the rupture to the shear wave velocity, the rise time, the corner frequency of the source spectrum, and a high frequency filter. The values of the parameters related to the stochastic element source model were adjusted for different tectonic regions, and the others were selected for several possible cases. The response spectra were constructed from the synthesized ground motion time history and compared with the different parameter values. The frequency range affected by each parameter and the differences of the spectral accelerations were evaluated.