The non-controlled closing of High-voltage SF6 gas circuit breaker can cause transient current and overvoltage in the field. The controlled closing technology is an effective way to reduce transient current and voltage, prevent equipment failures, and improve power quality. For the development of controlled closing, it is obviously necessary to determine the withstand voltage between arc contacts of High-voltage SF6 gas circuit breaker in making operation. This paper focuses on decrease of pressure and density of SF6 gas that can affect withstand voltage between arc contacts in making operation. The dielectric strength between arc contacts could be improved by minimizing the decrement of pressure and density of SF6 gas obtained by simulation and test and moreover the rate of decrease of dielectric strength (RDDS) of arc contacts could be foreseen.