- 원통형 마그네트론 스퍼터링 장비의 방전특성과 박막구조에 관한 연구
- ㆍ 저자명
- 오창섭,한창석,Oh. Chang-Sup,Han. Chang-Suk
- ㆍ 간행물명
- 열처리공학회지
- ㆍ 권/호정보
- 2012년|25권 1호|pp.1-5 (5 pages)
- ㆍ 발행정보
- 한국열처리공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The purpose of this study is to prepare a high strength fiberglass reinforced metal. Aluminum covering was carried out over carbon materials such as carbon fiber in order to increase their wettability to molten metals such as aluminum. A sputtering apparatus with a cylindrical target was fabricated to carry out the covering. Sputtering was caused by glow discharge between the target and the two anode plates attached to its top and bottom. As the substrate for preliminary test, a thin carbon wire was used instead of carbon fiber, and the wire was placed at the central axis of the target. Aluminium coating was formed on the whole surface of the substrate. The formation rate and structure of coating were varied by controlling the electrical potential of substrate. When the substrate was electrically isolated, coating with columnar structure was formed with a formation rate of $15{mu}m/hr$. In case of grounded substrate, coating with amorphous structure was formed with a formation rate of $7{mu}m/hr$.