- 마이크로 마모 시험기 개발을 위한 설계 방안 및 구조 해석
- ㆍ 저자명
- 유신성,김대은,Yoo. Shin-Sung,Kim. Dae-Eun
- ㆍ 간행물명
- 정보저장시스템학회논문집
- ㆍ 권/호정보
- 2012년|8권 1호|pp.6-10 (5 pages)
- ㆍ 발행정보
- 정보저장시스템학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The tribological behavior of microsystems needs to be clearly understood in order to improve the reliability of precision components. For example, friction and wear phenomena pose serious problems in MEMS applications. As a first step to investigate the tribological behavior of such systems, an appropriate testing system must be acquired. In this work, a micro-wear tester based MEMS platform was designed. The main concern was to achieve a desirable range of horizontal displacement for the specimen holder and also to apply a normal force in the tens of ${mu}N$ range. The structural analysis of the micro-wear tester showed that the proposed design satisfied these requirements while maintaining the structural integrity.