In thermal barrier coating (TBC) systems, the life of the coating depends on thermally grown oxide (TGO) layer because most of the failure of TBCs occurs when TGO growth increases. In order to inhibit TGO growth, process was additionally carried out before the heat treatment of the TBC coating layer at $1200^{circ}C$ in air. In the additional process, heat treatment in vacuum furnace of < $10^{-5}$ torr was conducted for 7 h and 14 h before the heat treatment. The area and length of TGO, as well as the crack length in the TBC were characterized using a scanning electron microscope (SEM). The TGO thickness and crack of specimens pre-heat treated in vacuum furnace were reduced by 45% compare to those heat treated in furnace. Consequently, pre-heat treatment in a vacuum furnace process lead to effective inhibition of growth of the TGO.