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A Three-axis Translation Stage Using Opposing Wedges with Error Compensation
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  • A Three-axis Translation Stage Using Opposing Wedges with Error Compensation
  • A Three-axis Translation Stage Using Opposing Wedges with Error Compensation
저자명
Khim. Gyung-Ho,Ro. Seung-Kook,Park. Jong-Kweon,Ehmann. Kornel
간행물명
International journal of precision engineering and manufacturing
권/호정보
2012년|13권 3호|pp.401-406 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We describe the development of a three-axis translation stage using wedges and its motion error compensation. The three-axis stage uses three wedges and is capable of translation in the vertical and longitudinal directions by controlling the horizontal separation of two opposing wedges. An independent linear translation stage is used to achieve displacement along the third axis. Compensation for straightness and positioning errors is achieved using the combined motion of the two opposing wedges and the motion of an independent linear stage. The straightness error in the vertical and horizontal directions through the longitudinal axis was 0.83 ${mu}m$ and 1.65 ${mu}m$, respectively, before compensation and 0.22 ${mu}m$ and 0.29 ${mu}m$ with error compensation. The positioning error through the longitudinal axis was reduced from 8.96 ${mu}m$ to 0.85 ${mu}m$.