Generally, micro cutting process has much higher specific cutting energy and more vulnerable tool volumes and strength compared to conventional cutting process. Besides, these characteristics of micro cutting processes which make much more tool wear and burr occur due to the cutting heat generated during processing greatly deteriorate the quality of cutting feature. In this study, the low temperature micro cutting process was proposed that can secure favorable the quality of micro cutting features by the tool wear reduction and cutting heat cooling and micro cutting experiments were performed under various cutting lubrication conditions. In order to analyze the characteristics of processing by cutting lubrication condition, cutting force monitoring using tool dynamometer, FFT analysis of micro cutting force data, the analysis of tool wear images and the SEM images analysis of fabricated micro slot feature were conducted. Finally, the efficiency of proposed micro cutting process was verified by the total results of abovementioned analysis processes.