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Investigation of the Changes of Fabry-Perot Fringe Patterns in Porous Silicon During Etching Process
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  • Investigation of the Changes of Fabry-Perot Fringe Patterns in Porous Silicon During Etching Process
  • Investigation of the Changes of Fabry-Perot Fringe Patterns in Porous Silicon During Etching Process
저자명
Jang. Seunghyun
간행물명
Journal of the Chosun Natural Science
권/호정보
2012년|5권 1호|pp.13-17 (5 pages)
발행정보
조선대학교 기초과학연구원
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정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Changes of Fabry-Perot fringe patterns in porous silicon during etching process has been investigated. Four porous silicon samples were prepared with four different etch currents: (a) 10 $mA/cm^2$, (b) 30 $mA/cm^2$, (c) 50 $mA/cm^2$, (d) 100 $mA/cm^2$, respectively. Optical characterization of Fabry-Perot fringe pattern on porous silicon was achieved by Ocean optics 2000 spectrometer. The change of Fabry-Perot fringes was monitored and measured during the etching process. Fabry-Perot fringes pattern start to form after couple of minutes. As the etching time increased, more reflection peaks were observed. Its full width at half maximum (FWHM) decreased rapidly when the etching time increased.