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A Compliant Parallel Mechanism with Flexure-based Joint Chains for Two Translations
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  • A Compliant Parallel Mechanism with Flexure-based Joint Chains for Two Translations
  • A Compliant Parallel Mechanism with Flexure-based Joint Chains for Two Translations
저자명
Choi. Kee-Bong,Lee. Jae Jong,Kim. Gee Hong,Lim. Hyung Jun
간행물명
International journal of precision engineering and manufacturing
권/호정보
2012년|13권 9호|pp.1625-1632 (8 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

A compliant parallel mechanism for two translations is proposed and applied to a XY fine motion stage driven by piezo actuators. Four flexure-based prismatic-prismatic joint chains are arranged in four sides of a target platform to implement the compliant parallel mechanism. Among others, two are passive joint chains for only motion guidance, and the others are active joint chains for motion guidance merging the function of the displacement amplification of a piezo actuator. Due to the active joint chains, the proposed mechanism has more compact structure than the others which have the separated mechanisms of the motion guidance and the displacement amplification. In addition, the compliant mechanism has a monolithic structure not to be assembled. The compliant mechanism is designed, verified to satisfy some design constraints using Finite element Analysis, and then combined with piezo actuators and capacitance sensors. The characteristics and the performance of the piezo-driven compliant parallel mechanism are demonstrated by experiments.