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Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway
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  • Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway
  • Precision Measurement of Rail Form Error in a Closed Type Hydrostatic Guideway
저자명
Oh. Jeong Seok,Khim. Gyungho,Oh. Jung Soo,Park. Chun Hong
간행물명
International journal of precision engineering and manufacturing
권/호정보
2012년|13권 10호|pp.1853-1859 (7 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

In this paper, a measuring device and measuring method are proposed to measure the rail profiles of a closed type guideway with submicrometer accuracy. The device is applied to hydrostatic bearing table and a mixed two-probe method (MTPM) is applied to measure the rail profile and linear motion error of the device. The effectiveness of the proposed measuring device is experimentally verified in two ways: In the case of the vertical direction, linear motion errors of the device tested on the upper and lower rail, respectively, are compared. In the case of the horizontal direction, the measured rail profiles using the proposed device are compared with directly measured profiles using a straight-edge and two probes (SEM). In the experiments on the vertical rail, both linear motion errors of the measuring device obtained from the upper rail and the lower rail show good agreement and the measurement accuracy is in a range of ${pm}0.11{sim}{pm}0.15{mu}m$. In the experiments on the horizontal rail, the measured rail profile by the MTPM agreed well with the profile measured by SEM. However, because the rail has an abruptly varied surface, the measurement accuracy in this case deteriorated to a range of ${pm}0.19{sim}{pm}0.26{mu}m$. From the experimental results, it is confirmed that the proposed measuring device with the MPTM is very effective to measure closed type multiple rail profiles with submicrometer accuracy.