In this paper, we presents a robust control system design for compensating hysteresis of a piezoelectric actuator-based actuation unit. First, the dynamics between the input voltage and the output displacement of the actuation unit are unravelled via a non-parametric system identification method. From the dynamic characteristics of those experimental transfer functions, a parametric model is then derived, whose dynamics match those of the non-parametric ones under various conditions on input voltages. A robust controller is constructed on the basis of this parametric model in order not only to effectively compensate the hysteresis of the actuation unit but also to guarantee the robust stability. Extensive experiments show that the proposed robust control system successfully mitigate the effect of the hysteresis and improve the tracking capability of the actuation unit.