This paper focuses on the efforts for minimization of burr formation and improvement of hole surface roughness following machining of micro through-hole. The main idea deals with the development of a micro compound tool consisting of two different parts: a micro flat drill (drilling part) and a micro diamond-electroplated-tool (grinding part). The finishing diameter of each drilling and grinding parts are $90{mu}m$ and $100{mu}m$, respectively. Furthermore, the study also focuses on the effect of entrance taper of grinding part, drill diameter and web thickness. The used wokrpiece was made of stainless steel (SUS304) with a thickness of $100{mu}m$. From the experiment, it was found that the tool having entrance taper, drill diameter and web thickness of 10/100, $90{mu}m$ and $50{mu}m$, respectively, shows the best performance in hole machining especially in burr minimization. Furthermore, the developed micro compound tool showed significant better surface roughness and burr minimization compared to usual micro twist drill and micro flat drill.