Microvibration problem of high-technology facilities, such as semi-conductor plants and TFT-LCD plants, has been considered as important factors that affects the performance of products and thus it is regarded as important in facilities with high precision equipments. In this paper, various base isolation control systems are used to investigate their microvibration control performance. To this end, train-induced ground acceleration is used for time history analysis and three-story example building structure is employed. Microvibration control performance of passive and smart base isolation systems have been investigated in this study. Based on numerical simulation results, it has been verified that smart base isolation system can control microvibration of a high-technology facility subjected to train-induced excitation.