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Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage
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  • Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage
  • Design of a Controller for Enhancing Positioning Performance of a PZT Driven Stage
저자명
박종성,정규원,Park. J.S.,Jeong. Kyu-Won
간행물명
한국생산제조시스템학회지
권/호정보
2012년|21권 3호|pp.465-472 (8 pages)
발행정보
한국생산제조시스템학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

This paper describes a new robust control algorithm which can be used to enhance the positioning performance of an ultra-precision positioning system. The working table is supported by flexure hinges and moved by a piezoelectric actuator, whose position is measured by an ultra-precise linear encoder. The system dynamics is very complicated because the movement of the table is governed by both the mechanical characteristics and those of the PZT actuator. So that, the dynamics of the stage was modeled roughly in this paper, and the overall system was formularized to solve the small gain problem. A series of experiments was conducted in order to verify the usefulness of the proposed algorithm. From the experimental results, the positioning performance such as the accuracy, the rise time and the hysteresis nonlinearity were greatly improved.