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A compact and fast nano-stylus profiling head for optical instruments
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  • A compact and fast nano-stylus profiling head for optical instruments
  • A compact and fast nano-stylus profiling head for optical instruments
저자명
Park. Jae-Hong,Jo. Yang-Keun,Kim. Ji-Hoe,Lee. Dong-Yeon
간행물명
Journal of mechanical science and technology
권/호정보
2012년|26권 7호|pp.2077-2080 (4 pages)
발행정보
대한기계학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

The current study developed a compact and high-speed stylus-profiling head with overall dimensions of $34.3{ imes}32.5{ imes}33.7mm^3$. A simple linear flexure leaf spring was used as a precision guide method for the profiling head along a vertical axis and for the assembly of an infrared light-emitting diode. A position-sensitive photo-diode was used for as a simple sensing method. The static and dynamic forces, which can be controlled electronically using a vertical solenoid, were in the range of $10^{-2}N$ to $10^{-5}N$. Displacement was in the range of 80 nm to $87.2{mu}m$, making it adequate for the precise surface measurements of hard materials. The sensor resolution was less than 10 nm. The designed profiling head had a moving mass of 1 mg and speed within 100 Hz.