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Low Temperature Characteristics of Schottky Barrier Single Electron and Single Hole Transistors
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  • Low Temperature Characteristics of Schottky Barrier Single Electron and Single Hole Transistors
  • Low Temperature Characteristics of Schottky Barrier Single Electron and Single Hole Transistors
저자명
Jang. Moongyu,Jun. Myungsim,Zyung. Taehyoung
간행물명
ETRI journal
권/호정보
2012년|34권 6호|pp.950-953 (4 pages)
발행정보
한국전자통신연구원
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

Schottky barrier single electron transistors (SB-SETs) and Schottky barrier single hole transistors (SB-SHTs) are fabricated on a 20-nm thin silicon-on-insulator substrate incorporating e-beam lithography and a conventional CMOS process technique. Erbium- and platinum-silicide are used as the source and drain material for the SB-SET and SB-SHT, respectively. The manufactured SB-SET and SB-SHT show typical transistor behavior at room temperature with a high drive current of $550{mu}A/{mu}m$ and $-376{mu}A/{mu}m$, respectively. At 7 K, these devices show SET and SHT characteristics. For the SB-SHT case, the oscillation period is 0.22 V, and the estimated quantum dot size is 16.8 nm. The transconductance is $0.05{mu}S$ and $1.2{mu}S$ for the SB-SET and SB-SHT, respectively. In the SB-SET and SB-SHT, a high transconductance can be easily achieved as the silicided electrode eliminates a parasitic resistance. Moreover, the SB-SET and SB-SHT can be operated as a conventional field-effect transistor (FET) and SET/SHT depending on the bias conditions, which is very promising for SET/FET hybrid applications. This work is the first report on the successful operations of SET/SHT in Schottky barrier devices.