- 에너지 반환회로를 갖는 비대칭 펄스형 DC 플라즈마 전원장치에 관한 연구
- ㆍ 저자명
- 추대혁,유성환,김준석,한기준,Choo. Dae-Hyeok,Yoo. Sung-Hwan,Kim. Joohn-Sheok,Han. Ki-Joon
- ㆍ 간행물명
- 전력전자학회 논문지
- ㆍ 권/호정보
- 2013년|18권 6호|pp.593-600 (8 pages)
- ㆍ 발행정보
- 전력전자학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
The asymmetric pulsed DC reactive magnetron sputtering system is widely used for the high quality plasma sputtering process such as a thin film deposition. In asymmetric pulsed DC power supply a reverse voltage is applied to the target periodically to minimize arc discharging effect. When sputtering in the mid-frequency range (20-350 kHz), the periodic target voltage reversals suppress arc formation at the target and provide long-term process stability. Thus, high quality, defect-free coatings of these materials can now be deposited at competitive rates. In this paper, a new style asymmetric pulsed DC power supply including mid-transformer is presented. In the proposed, an energy recovery circuit is adopted to reduce the mutual inductance of the transformer. As a result, the system dynamics of the voltage control loop is increased highly and the non-linear voltage boosting effect of the conventional system is removed. This work was proved through simulation and laboratory based experimental study.