- A theoritical study on spin coating technique
- A theoritical study on spin coating technique
- ㆍ 저자명
- Tyona. M.D.
- ㆍ 간행물명
- Advances in materials research
- ㆍ 권/호정보
- 2013년|2권 4호|pp.195-208 (14 pages)
- ㆍ 발행정보
- 테크노프레스
- ㆍ 파일정보
- 정기간행물|ENG| PDF텍스트
- ㆍ 주제분야
- 기타
A comprehensive theory of the spin coating technique has been reviewed and the basic principles and parameters controlling the process are clearly highlighted, which include spin speed, spin time, acceleration and fume exhaust. The process generally involves four stages: a dispense stage, substrate acceleration stage, a stage of substrate spinning at a constant rate and fluid viscous forces dominate fluid thinning behaviour and a stage of substrate spinning at a constant rate and solvent evaporation dominates the coating thinning behaviour. The study also considered some common thin film defects associated with this technique, which include comet, striation, chucks marks environmental sensitivity and edge effect and possible remedies.