- 정밀 위치 결정 및 고하중 부담 능력을 지닌 6-자유도 스테이지의 설계
- ㆍ 저자명
- 신현표,Shin. Hyun-Pyo
- ㆍ 간행물명
- 한국정밀공학회지
- ㆍ 권/호정보
- 2013년|30권 1호|pp.105-112 (8 pages)
- ㆍ 발행정보
- 한국정밀공학회
- ㆍ 파일정보
- 정기간행물| PDF텍스트
- ㆍ 주제분야
- 기타
This paper presents the structural design and finite element analysis of precision stage based on a double triangular parallel mechanism for precision positioning and large force generation. Recently, with the acceleration of miniaturization in mobile appliances, the demand for precision aligning and bonding has been increasing. Such processes require both high precision and large force generation, which are difficult to obtain simultaneously. This study aimed at constructing a precision stage that has high precision, long stroke, and large force generation. Actuators were tactically placed and flexure hinges were carefully designed by optimization process to constitute a parallel mechanism with a double triangular configuration. The three actuators in the inner triangle function as an in-plane positioner, whereas the three actuators in the outer triangle as an out-of-plane positioner. Finite element analysis is performed to validate load carrying performances of the developed precision stage.