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인체 삽입용 LC 공진형 혈압 센서 디자인 및 제작
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  • 인체 삽입용 LC 공진형 혈압 센서 디자인 및 제작
저자명
김진태,김성일,정연호,Kim. Jin-Tae,Kim. Sung Il,Joung. Yeun-Ho
간행물명
전기전자재료학회논문지
권/호정보
2013년|26권 3호|pp.171-176 (6 pages)
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한국전기전자재료학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In this paper, we present a MEMS (micro-electro-mechanical system) implantable blood pressure sensor which has designed and fabricated with consideration of size, design flexibility, and wireless detection. Mechanical and electrical characterizations of the sensor were obtained by mathematical analysis and computer aided simulation. The sensor is composed of two coils and a air gap capacitor formed by separation of the coils. Therefore, the sensor produces its resonant frequency which is changed by external pressure variation. This frequency movement is detected by inductive coupling between the sensor and an external antenna coil. Theoretically analyzed resonant frequency of the sensor under 760 mmHg was calculated to 269.556 MHz. Fused silica was selected as sensor material with consideration of chemical and electrical reaction of human body to the material. $2mm{ imes}5mm{ imes}0.5mm$ pressure sensors fitted to radial artery were fabricated on the substrates by consecutive microfabrication processes: sputtering, etching, photolithography, direct bonding and laser welding. Resonant frequencies of the fabricated sensors were in the range of 269~284 MHz under 760 mmHg pressure.