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A Study on Properties of Al:ZnO Thin Films by Used RTP Method
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  • A Study on Properties of Al:ZnO Thin Films by Used RTP Method
  • A Study on Properties of Al:ZnO Thin Films by Used RTP Method
저자명
Yang. Hyeon-Hun,Kim. Han-Wool,So. Soon-Youl,Park. Gye-Choon,Lee. Jin,Na. Kil-Ju
간행물명
Transactions on electrical and electronic materials
권/호정보
2013년|14권 2호|pp.90-93 (4 pages)
발행정보
한국전기전자재료학회
파일정보
정기간행물|ENG|
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
서지반출

기타언어초록

Al:ZnO thin films were deposited using the radio frequency magnetron sputtering technique at various temperatures and sputtering powers. With the increase in the deposition temperature and the decrease in the radio frequency sputtering power, the crystallinity was increased and the surface roughness was decreased, which lead to the decrease in the electrical resistivity of the film. It is also clearly observed that, the intensity of the (002) XRD peak increases with increasing the substrate temperature [1,2]. The electrical resistivity and optical transmittance of the Al:ZnO thin film were analyzed as a function of the post-annealing temperature. It can be seen that with the annealing temperature set at $400^{circ}C$, the resistivity decreases to a minimum value of $4.1{ imes}10^{-3}{Omega}cm$ and the transmittance increases to a maximum value of 85% of the Al:ZnO thin film.