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Cu-Cu2O계 공융액상을 활용한 Cu/AlN 직접접합
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  • Cu-Cu2O계 공융액상을 활용한 Cu/AlN 직접접합
저자명
홍준성,이정훈,오유나,조광준,류도형,오승탁,현창용,Hong. Junsung,Lee. Jung-Hoon,Oh. You-Na,Cho. Kwang-Jun,Riu. Doh-Hyung,Oh. Sung-Tag,Hyun. Chang-Yong
간행물명
한국분말야금학회지
권/호정보
2013년|20권 2호|pp.114-119 (6 pages)
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한국분말야금학회
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이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

In the DBC (direct bonding of copper) process the oxygen partial pressure surrounding the AlN/Cu bonding pairs has been controlled by Ar gas mixed with oxygen. However, the direct bonding of Cu with sound interface and good adhesion strength is complicated process due to the difficulty in the exact control of oxygen partial pressure by using Ar gas. In this study, we have utilized the in-situ equilibrium established during the reaction of $2CuO{ ightarrow}Cu_2O$ + 1/2 $O_2$ by placing powder bed of CuO or $Cu_2O$ around the Cu/AlN bonding pair at $1065{sim}1085^{circ}C$. The adhesion strength was relatively better in case of using CuO powder than when $Cu_2O$ powder was used. Microstructural analysis by optical microscopy and XRD revealed that the interface of bonding pair was composed of $Cu_2O$, Cu and small amount of CuO phase. Thus, it is explained that the good adhesion between Cu and AlN is attributed to the wetting of eutectic liquid formed by reaction of Cu and $Cu_2O$.