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Phase Shifting Interferometry for Large-sized Surface Measurements by Sweeping the Repetition Rate of Femtosecond Light Pulses
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  • Phase Shifting Interferometry for Large-sized Surface Measurements by Sweeping the Repetition Rate of Femtosecond Light Pulses
  • Phase Shifting Interferometry for Large-sized Surface Measurements by Sweeping the Repetition Rate of Femtosecond Light Pulses
저자명
Joo. Woo-Deok,Park. Jiyong,Kim. Seungman,Kim. Seungchul,Kim. Yunseok,Kim. Seung-Woo,Kim. Young-Jin
간행물명
International journal of precision engineering and manufacturing
권/호정보
2013년|14권 2호|pp.241-246 (6 pages)
발행정보
한국정밀공학회
파일정보
정기간행물|ENG|
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기타
이 논문은 한국과학기술정보연구원과 논문 연계를 통해 무료로 제공되는 원문입니다.
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기타언어초록

We report the use of a femtosecond pulse laser as an interferometric low-coherent light source for precision surface-profile metrology. Unequal-path non-symmetric low-coherence interferometer is configured to measure large-sized optics with a small reference mirror; such measurement is feasible only with ultra-short mode-locked pulses with periodic temporal low-coherence and high spatial coherence. The temporal delay between pulses from the reference and the target optics is precisely scanned for phase shifting interferometry by tuning the repetition rate of femtosecond pulses referenced to the Rb atomic clock of a time standard. This method enables us to perform high-precision surface measurements without parasitic fringes being produced by stray reflection and removes all mechanical scanning parts from the interferometer.