Objectives: Effectiveness and conditions of vapor-phase hydrogen peroxide (VPHP) system on decontamination of Geobacillus stearothermophilus(GS) spores, Escherichia coli (E.coli) and Enterobacteria phage felix01 (felix01) were determined. Methods: The VPHP system was designed to vaporize 35% (w/w) solution of hydrogen peroxide, continuously to inject and withdraw VPHP. The system and VHP 1000ED (Steris) were operated such that dehumidification and conditioning were initiated without samples in the chamber. Then the samples were loaded into and removed. Coupons (glass, anodizing, silicon, viton) with GS spores ($1{ imes}10^6$ colony forming unit/mL [CFU/mL]), E.coli ($1{ imes}10^7$ CFU/mL) and felix01 ($1{ imes}10^7$ plaque forming unit/mL[PFU/mL]), and Biological Indicator (BI) with GS spores ($1{ imes}10^6$ CFU/mL) on stainless steel coupons were used. The tested samples were sonicated and vortexed, and then were plated for enumeration, followed by incubation at $55^{circ}C$, 24 hr for GS spores, and at $37^{circ}C$, 24 hr for E.coli and felix01. BI analysis in broth culture was only qualitative. Results: The efficacy of the VPHP system on decontamination was almost equivalent to that of VHP 1000ED. The conditions for complete decontamination with the VPHP system was as follows: concentration; 700~450 ppm, relative humidity; approximately 55%, and temperature; $34{sim}32^{circ}C$. When comparing the decontamination efficiency among different kinds of coupons, glass was the most effective, however, all kinds of coupons were decontaminated completely after 60 min exposure in both systems. Conclusion: The VPHP system can be recommended as an alternative system for traditional system using ethylene oxide, formaldehyde or chlorine dioxide.